OPTI-Sense - NDIR

Specialty Process Gas Monitors

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OPTI-Sense Series

Non-Dispersive Infrared Monitors

OPTI-SENSE NDIR FRONT & BACK.png

Features

Non-Dispersive Infrared (NDIR)
Ideal for any infrared-absorbing gases (SiF4, SiF3, CO, CO2, CF4, SF6, NF3, WF6 and other species) - Consult factory for your application.
Fast response time
High sensitivity
Species specific
No consumables
No moving parts

Maintenance

Maintenance section coming soon.

Downloads

Type	Title	File Size
	OPTI-Sense 5200 Manual	1056 KB
	Fundamentals of Electro-Static Discharge (ESD)	216 KB
	OPTI-Sense Specifications	1583 KB
	OPTI-Sense规格 (Chinese Specification)	1906 KB
	Industrial Gas Instruments Overview	545 KB

Specifications

Measuring Principle	Non Dispersive IR absorption
Application	In Situ Measurement
Light Source	MEMS-based Pulsed IR Emitter
Materials	Corrosion Resistant Optics, Stainless Steel Wetted Parts
Dimensions (WxHxD)	4.72” x 8.66” x 3.15” (120 mm x 220 mm x 80 mm)
Weight	< 7 lbs (3.17 kg)
Analog Output	Factory set to 0-1, 5 or 10 volt
Digital Interface	RS-232 C
Response Time	< 10 seconds
Power Requirements	15 VDC - Less than 10 watts
Sample Ports	KF16 - 304 SS (for other options, consult factory)
Zeroing	Remote Zeroing Capability
Leak Testing	Vacuum Leak-Tight Cell
Software	Embedded (standard)
Approvals	CE
Warranty	1 year

Applications

Semiconductor

Description

The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.

All OPTI-Sense sensors are configured with analog and digital interfaces, making them easy to integrate into any process. Configurations are available for the measurement of single and dual gas species.

Who We Are

Teledyne API, a business unit of Teledyne Technologies Incorporated (NYSE:TDY), is a global market leader in air quality and process gas monitoring instrumentation headquartered in San Diego, California, USA.