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Production of semiconductor materials require extremely clean air supply that help ensure the quality of the materials being manufactured as well as specialized gases to enable production to occur smoothly and efficiently. Teledyne API carries a complete line of Industrial gas process instruments including those that both produce and measure gases in these unique applications. Teledyne API also provides specialty gas instruments designed to help reduce or eliminate Airborne Molecular Contamination (AMC) in the ultra-clean supply gas provided in these processes.​

Products
  • Dissolved Ozone Instruments
    • Gases
      Model
      Ranges
      Dissolved Ozone Instruments
      Up to 150 mg/L (150 ppmw)
  • Gas Calibrators & Zero Air Generators
    • Gases
      Model
      Ranges
      All gases
      Available MFC’s: 0-10 cc/min to 0-20 LPM
    • All gases
      Available MFC’s: 0-10 cc/min to 0-20 LPM
    • O3
      Ozone
      0-10 LPM, 30 PSI
    • O3
      Ozone
      Ozone Output: 50 ppb to 10 ppm
    • O3
      Ozone
      Ozone Output: 3 ppb to 10 ppm
  • Nitrogen Compounds Instruments
    • Gases
      Model
      Ranges
      NH3, NO, NO2, NOX
      Ammonia, Nitrogen Oxide, Nitrogen Dioxide
      0-50 ppb / 0-2,000 ppb
  • Ozone Controller​
    • Gases
      Model
      Ranges
      Ozonator Controller
      N/A
  • Ozone Destructs
    • Gases
      Model
      Ranges
      Catalytic O3 Destructs
      Check Sp​ecification
  • Particulate Instruments
    • Gases
      Model
      Ranges
      Continuous real-time PM Mass Monitoring
      PM2.5, PM10, PM10-2.5
  • Process Ozone Instruments
    • Gases
      Model
      Ranges
      Ozone Low Level
      Safety/Process Measurements
      0-1 ppm to 0-500 ppm
    • Ozone
      Process Measurements
      0-5 wt% / 0-20 wt%​
  • Specialty Gas Instruments
    • Gases
      Model
      Ranges
      NDIR Monitor
      (Non-Dispersive Infrared)
      Check Sp​ecification
  • Sulfur Compound Instruments
    • Gases
      Model
      Ranges
      H2S, SO2
      Hydrogen Sulfide, Sulfur Dioxide
      0-50 ppb / 0-5 ppm
    • TRS, SO2
      Total Reduced Sulfur, Sulfur Dioxide
      0-50 ppb / 0-10 ppm
    • TS
      Total Sulfur
      0-50 ppb / 0-20 ppm